IL600 / UP Machining Center

five axes.

process variety.

optics characterization.

The IL600 is a four- or optionally five-axis ultra-precision machining center for highly productive optics production. The integrated NanoGrip zero-point clamping systems are world leaders in flexibility in diamond machining systems. The IL600 enables the combination of diamond turning and free-form turning, planing and milling as well as the grinding of optical surfaces. In addition to the machining processes, we offer a range of contact and non-contact sensors that can be fully integrated into the machine and the control system for advanced component characterization.

dive into the details:

IL600 General
System Configuration Ultra Precision 4 (5) axis CNC high dynamic ultra precision machining center
Processes Turning, slow tool turning, fast tool turning, ruling, milling grinding, measuring
Machine Base Natural granite base for superb accuracy
Vibration Isolation Self leveling pneumatic isolation system (either passive or electronically controlled active leveling, option)
Control System Beckhoff CNC industrial standard high performance machine controller, Intel® CoreTM i7, Quad-Core
Programming resolution 1 nm linear, (0.01 nanometer optional) , 0.0000001 ° rotary
Set Points per second 3.000 (CNC), 10.000 (Direct Drive)
File Transfer USB, Ethernet
Water Control Active chiller, < 0.02 °C/ 2 h
Evacuation Machining chamber air evacuation filter < 1 μm
Turning Performance Form accuracy < 0.2 μm, surface roughness (Ra) < 3 nanometers
Work Piece Diameter 600 mm
Linear Axis
Travel X: 600mm, Z: 400mm, Y:250mm
Accuracy over Full Travel/Feedback Type `+/- 1 μm, resolution 0,03125 nm for all axes
Straightness `+/-0.1μm/ 100mm
Pitch, Roll, Yaw +/- 2 arcsec for all
Max. Speed X: 15 m/min
Drive System Brushless linear motor
Load Capacity / Stiffness 540 N/μm horizontal, 210 N/μm side
Media Supply Compact integrated hydrostatic supply unit ISO VG 22
Interface 2x NanoGrip Ultra precise clamping system 0.5 μm repeatability
Workholding Spindle
Type Groove compensated air bearing
Load Capacity 70 kg @ 6.9 bar
Axial/Radial Stiffness 228 N/μm / 98 N/μm @ 6.9 bar
Motion Accuracy Axial < 20 nm, radial < 20 nm
Max. Speed 5.000 rpm, bidirectional
Feedback Resolution 0.07 arcsec.
Thermal Control Integrated water cooling with chiller
Interface NanoGrip Ultra precise clamping system 0.5 μm repeatability
B-Axis (Optional)
Type Oil hydrostatic rotary axis
Drive Torque direct drive 21.9 Nm
Accuracy < 60 nm radial runout
Stiffness > 4.000 N/mm2 axial
Interface NanoGrip Ultra precise clamping system 0.5 μm repeatability
Overdrive (Optional)
Type Oil hydrostatic high dynamic linear axis (superior damping compared to aerostatic voice coil Fast Tool System)
Travel 50 mm
Programming Options CNC, Direct Drive 2D, Direct Drive 3D
Resolution of scale 0,03125 nm
Max. Speed 2m/sec
Air Conditioning Air flow circulation, overpressure for axis contamination prevention, △T <0.3°C
ILSONIC Diamond machining of steel / glass
Tactile measurment Touch probe
Optical surface scanning Chromatic confocal sensor

Innolite platforms are designed to be modular

  • Module 1
  • Module 2
  • Module 3
  • Module 1
  • Module 2
  • Module 3
  • Module 1
  • Module 2
  • Module 3