Consistent development of the Innolite machine technology to continuously increase precision have led to the new type of IL200. Unique linear axes without cables connected to the moving part (wireless technology) enable the slides to remain in position in the sub-nanometer range for surface roughness values <0.5 nm Ra in highly demanding applications such as cell phone camera technology. A newly developed air bearing spindle with 18,000 RPM enables leading efficiency in the series production of, for example, infrared lenses. Lightweight ceramic-based slides allow the dynamics of Fast Tool systems and the geometric diversity of Slow Tool technology to merge for the cost-efficient production of free-form surfaces and microstructures.
Ultra Precision Machine Tools
Driving Productivity in Ultra Precision Technology
IL200 | UP Lathe
dynamic. efficient. cost effective.
Technical Specification
IL200 General
| System Configuration | Ultra Precision 3 axis CNC high dynamic diamond turning lathe |
| Processes | Turning, slow tool turning, measuring |
| Machine Base | Natural granite base for superb accuracy |
| Vibration Isolation | Self leveling pneumatic isolation system (either passive or electronically controlled active leveling, option) |
| Control System | Beckhoff CNC industrial standard high performance machine controller, Intel® CoreTM i7, Quad-Core |
| Programming resolution | 1 nm linear, (0.01 nanometer optional) , 0.0000001 ° rotary |
| Set Points per second | 3.000 (CNC), 10.000 (Direct Drive) |
| File Transfer | USB, Ethernet |
| Water Control | Active chiller, < 0.02 °C/ 2 h |
| Evacuation | Machining chamber air evacuation filter < 1 μm |
| Turning Performance | Form accuracy < 0.1 μm, surface roughness (Ra) < 1.5 nanometers |
| Work Piece Diameter | 150 mm |
Linear Axis
| Travel | X: 200 mm; Z: 150mm |
| Accuracy over Full Travel/Feedback Type | +/- 1 μm, resolution 0,03125 nm |
| Straightness | +/-0.2 μm |
| Pitch, Roll, Yaw | +/- 2 arcsec for all |
| Max. Speed | 15 m/min |
| Drive System | Brushless linear motor |
| Load Capacity / Stiffness | 280 N/μm horizontal, 170 N/μm side |
| Media Supply | Compact integrated hydrostatic supply unit ISO VG 22 |
| Interface | 2x NanoGrip Ultra precise clamping system 0.5 μm repeatability |
Workholding Spindle
| Type | Groove compensated air bearing |
| Load Capacity | 30 kg @ 6.9 bar |
| Axial/Radial Stiffness | 228 N/μm / 98 N/μm @ 6.9 bar |
| Motion Accuracy | Axial < 20 nm, radial < 20 nm |
| Max. Speed | Position control : 4.000 rpm, speed control: 18.000 rpm, bidirectional |
| Feedback Resolution | 0.07 arcsec. |
| Thermal Control | Integrated water cooling with chiller |
| Interface | NanoGrip Ultra precise clamping system 0.5 μm repeatability |
Optional
| Air Conditioning | Air flow circulation, overpressure for axis contamination protection, △T <0.3°C |
| ILSONIC | Diamond machining of steel / glass (comapre ILSonic) |
| Tactile measurment | Touch probe (compare In Line Metrology) |
| Optical surface scanning | Chromatic confocal sensor |
IL300 | UP Lathe
flexible. productive. allrounder.
The IL300 is the leading ultra-precision diamond lathe for highly productive, highly flexible optics manufacturing. It was developed to increase productivity in ultra-precision technology. Consistently integrated zero-point clamping systems with submicron accuracy, a stainless-steel housing and a highly dynamic lightweight construction for maximum dynamics. The applications range from standard diamond turning to free-form manufacturing and microstructure generation to diamond turning of steel and infrared materials with ultrasound support (ILSONIC).
Also look at IlCentric300.
Key Features
NanoGrip
Our NanoGrip zero-point clamping system interface allows for submicron repeatability in exchanging tools, sensors for in line metrology and work pieces with only a few seconds. It’s a fundamental feature for the leading-edge productivity of Innolite´s ultra-precision machines.
Individual pallets with four index positions for rotating at 90° angular steps are the exchangeable interface for the chucks mounted and aligned at the spindle (for work piece exchange) and at the Z-slide (for tool and sensor exchange).
Due to it´s robust design, turning operation of up to 5.000 rpm is supported on the spindle side. With a vacuum chuck adapter provided by Innolite, standard diamond turning functionality meets high productivity in next generation optical manufacturing.
Technical Specification
IL300 General
| System Configuration | Ultra Precision 3 (4) axis CNC high dynamic diamond turning lathe |
| Processes | Turning, slow tool turning, measuring |
| Machine Base | Natural granite base for superb accuracy |
| Vibration Isolation | Self leveling pneumatic isolation system (either passive or electronically controlled active leveling, option) |
| Control System | Beckhoff CNC industrial standard high performance machine controller, Intel® CoreTM i7, Quad-Core |
| Programming resolution | 1 nm linear, (0.01 nanometer optional) , 0.0000001 ° rotary |
| Set Points per second | 3.000 (CNC), 10.000 (Direct Drive) |
| File Transfer | USB, Ethernet |
| Water Control | Active chiller, < 0.02 °C/ 2 h |
| Evacuation | Machining chamber air evacuation filter < 1 μm |
| Turning Performance | Form accuracy < 0.2 μm, surface roughness (Ra) < 3 nanometers |
| Work Piece Diameter | 300 mm |
Linear Axis
| Travel | X, Z: 300mm |
| Accuracy over Full Travel/Feedback Type | +/- 1 μm, resolution 0,03125 nm |
| Straightness | +/-0.2 μm |
| Pitch, Roll, Yaw | +/- 2 arcsec for all |
| Max. Speed | 15 m/min |
| Drive System | Brushless linear motor |
| Load Capacity / Stiffness | 420 N/μm horizontal, 210 N/μm side |
| Media Supply | Compact integrated hydrostatic supply unit ISO VG 22 |
| Interface | 2x NanoGrip Ultra precise clamping system 0.5 μm repeatability |
Workholding Spindle
| Type | Groove compensated air bearing |
| Load Capacity | 70 kg @ 6.9 bar |
| Axial/Radial Stiffness | 228 N/μm / 98 N/μm @ 6.9 bar |
| Motion Accuracy | Axial < 20 nm, radial < 20 nm |
| Max. Speed | 5.000 rpm, bidirectional |
| Feedback Resolution | 0.07 arcsec. |
| Thermal Control | Integrated water cooling with chiller |
| Interface | NanoGrip Ultra precise clamping system 0.5 μm repeatability |
B-Axis (Optional)
| Type | Oil hydrostatic rotary axis |
| Drive | Torque direct drive 21.9 Nm |
| Accuracy | < 60 nm radial runout |
| Stiffness | > 4.000 N/mm2 |
| Interface | NanoGrip Ultra precise clamping system 0.5 μm repeatability |
Optional
| Air Conditioning | Air flow circulation, overpressure for axis contamination protection, △T <0.3°C |
| ILSONIC | Diamond machining of steel / glass (comapre ILSonic) |
| Tactile measurment | Touch probe (compare In Line Metrology) |
| Optical surface scanning | Chromatic confocal sensor |
Videos
IL500 | UP Lathe
large scale. process combination. automation.
In addition to large components with diameters of up to 500 mm, the IL500 offers unique options for simultaneous process equipment or parallelization of processes. With three or four ultra-precision axes, spherical, free-form and also micro-structured optics can be efficiently manufactured. Integrated measurement technology enables the inline characterization of surfaces with direct compensation. In this way, preprocessing steps and ultra-precise finishing can be efficiently combined with the highest levels of accuracy. Prepared for loading with robots, the machine is the ideal platform for automated series production.
IL600 | UP Machining Center
five axes. process variety. optics characterization.
The IL600 is a four- or optionally five-axis ultra-precision machining center for highly productive optics production. The integrated NanoGrip zero-point clamping systems are world leaders in flexibility in diamond machining systems. The IL600 enables the combination of diamond turning and free-form turning, planing and milling as well as the grinding of optical surfaces. In addition to the machining processes, we offer a range of contact and non-contact sensors that can be fully integrated into the machine and the control system for advanced component characterization.
Key Features
Overdrive
The Innolite Overdrive is an ultra-high dynamic free-form and micro structure generator for diamond turning. It uniquely combines the advantages of slow slide and fast tool turning for advanced diamond untrue machining. Its linear motor driven hydrostatic slide with a moving mass of only 3 kg compares to the damping and the stiffness of a standard ultra-precision axis ensuring superb surface finish compared to an aerostatic fast tool servo. However, the dynamic reaction force during high dynamic motion is significantly lower and corresponding achievable dynamics are much higher compared to conventional slow tool turning. In terms of control system integration, the Overdrive can be programmed as a standard CNC axis as well as with the Innolite DirectDrive 2D or Direct Drive 3D.
NanoGrip
Our NanoGrip zero-point clamping system interface allows for submicron repeatability in exchanging tools, sensors for in line metrology and work pieces with only a few seconds. It’s a fundamental feature for the leading-edge productivity of Innolite´s ultra-precision machines.
Individual pallets with four index positions for rotating at 90° angular steps are the exchangeable interface for the chucks mounted and aligned at the spindle (for work piece exchange) and at the Z-slide (for tool and sensor exchange).
Due to it´s robust design, turning operation of up to 5.000 rpm is supported on the spindle side. With a vacuum chuck adapter provided by Innolite, standard diamond turning functionality meets high productivity in next generation optical manufacturing.
Technical Specification
IL600 General
| System Configuration | Ultra Precision 4 (5) axis CNC high dynamic ultra precision machining center |
| Processes | Turning, slow tool turning, fast tool turning, ruling, milling grinding, measuring |
| Machine Base | Natural granite base for superb accuracy |
| Vibration Isolation | Self leveling pneumatic isolation system (either passive or electronically controlled active leveling, option) |
| Control System | Beckhoff CNC industrial standard high performance machine controller, Intel® CoreTM i7, Quad-Core |
| Programming resolution | 1 nm linear, (0.01 nanometer optional) , 0.0000001 ° rotary |
| Set Points per second | 3.000 (CNC), 10.000 (Direct Drive) |
| File Transfer | USB, Ethernet |
| Water Control | Active chiller, < 0.02 °C/ 2 h |
| Evacuation | Machining chamber air evacuation filter < 1 μm |
| Turning Performance | Form accuracy < 0.2 μm, surface roughness (Ra) < 3 nanometers |
| Work Piece Diameter | 600 mm |
Linear Axis
| Travel | X: 600mm, Z: 400mm, Y:250mm |
| Accuracy over Full Travel/Feedback Type | `+/- 1 μm, resolution 0,03125 nm for all axes |
| Straightness | `+/-0.1μm/ 100mm |
| Pitch, Roll, Yaw | +/- 2 arcsec for all |
| Max. Speed | X: 15 m/min |
| Drive System | Brushless linear motor |
| Load Capacity / Stiffness | 540 N/μm horizontal, 210 N/μm side |
| Media Supply | Compact integrated hydrostatic supply unit ISO VG 22 |
| Interface | 2x NanoGrip Ultra precise clamping system 0.5 μm repeatability |
Workholding Spindle
| Type | Groove compensated air bearing |
| Load Capacity | 70 kg @ 6.9 bar |
| Axial/Radial Stiffness | 228 N/μm / 98 N/μm @ 6.9 bar |
| Motion Accuracy | Axial < 20 nm, radial < 20 nm |
| Max. Speed | 5.000 rpm, bidirectional |
| Feedback Resolution | 0.07 arcsec. |
| Thermal Control | Integrated water cooling with chiller |
| Interface | NanoGrip Ultra precise clamping system 0.5 μm repeatability |
B-Axis (Optional)
| Type | Oil hydrostatic rotary axis |
| Drive | Torque direct drive 21.9 Nm |
| Accuracy | < 60 nm radial runout |
| Stiffness | > 4.000 N/mm2 axial |
| Interface | NanoGrip Ultra precise clamping system 0.5 μm repeatability |
Overdrive (Optional)
| Type | Oil hydrostatic high dynamic linear axis (superior damping compared to aerostatic voice coil Fast Tool System) |
| Travel | 50 mm |
| Programming Options | CNC, Direct Drive 2D, Direct Drive 3D |
| Resolution of scale | 0,03125 nm |
| Max. Speed | 2m/sec |
Optional
| Air Conditioning | Air flow circulation, overpressure for axis contamination prevention, △T <0.3°C |
| ILSONIC | Diamond machining of steel / glass |
| Tactile measurment | Touch probe |
| Optical surface scanning | Chromatic confocal sensor |
Videos
Software for Generating Optics Manufcaturing Jobs | ILCAM
ILCAM is the programming platform for all Innolite diamond and center turning machines. It is designed to create high quality production jobs for advanced optics manufacturing, consisting of pre-machining data analysis, referencing routines, machining programs, measurement cycles for quality assurance and integrated quality documentation. It allows for conventional optics manufacturing, free-form and micro structure generation as well as for combined optical surfaces. Different from conventional CAD/CAM software the fully automated integration of optics characterization routines is of highest value during production. With its functional spectrum, ILCAM is a unique platform for ultra-precision machining.
Videos
Advanced Optics Characterization | In Line Metrology
Innolite is consequently developing in line metrology solutions consisting of ultra-precision contact and non-contact sensors, their productive machine integration as well as corresponding software routines for user friendly application. The standardized use of such metrology is a key for “driving productivity in ultra-precision technology” to Innolite. We measure dimensions, surfaces and optical axes on our machines to reach highest quality standards
Technical Specification
Tactile Sensor
| Measuring Task | Dimensions |
| Measuring Directions | 3 (x, y, z), tactile |
| Sensitivity | 0,25 μm |
| Contact Force | 0,07 N |
Chromatic Confocal Probe
| Measuring Task | Surface shape, surface orientation |
| Measuring directions | 1 (z), non-contact |
| Distance Sensor / Focus | 10 mm |
| Measuring Range | 1000 μm |
| Resolution | 26 nm |
| Acceptance angle | `+/- 15° @ error < 0.5 μm |
| Rotary Alignment of Probe | 0°-90° |
LVDT Scanning Probe
| Measuring Task | Surface shape, surface orientation |
| Measuring Directions | 1 (z), tactile |
| Sensitivity | 25 nm |
| Contact Scanning Force | 1 mN |
Autocollimator
| Measuring Task | Optical axis of sphere |
| Focal distance | 200 mm, 300 mm |
| Objectives | 6 automated exchange |
| Resolution | < 1 ” of optical axis |
| Wavelength | 532nm, 634nm |