Ultra Precision Machine Tools

Driving Productivity in Ultra Precision Technology
Innolite - Ultra Precision Machine Tools - IL200

IL200 | UP Lathe

dynamic. efficient. cost effective.

Consistent development of the Innolite machine technology to continuously increase precision have led to the new type of IL200. Unique linear axes without cables connected to the moving part (wireless technology) enable the slides to remain in position in the sub-nanometer range for surface roughness values ​​<0.5 nm Ra in highly demanding applications such as cell phone camera technology. A newly developed air bearing spindle with 18,000 RPM enables leading efficiency in the series production of, for example, infrared lenses. Lightweight ceramic-based slides allow the dynamics of Fast Tool systems and the geometric diversity of Slow Tool technology to merge for the cost-efficient production of free-form surfaces and microstructures.

Technical Specification

IL200 General
System Configuration Ultra Precision 3 axis CNC high dynamic diamond turning lathe
Processes Turning, slow tool turning, measuring
Machine Base Natural granite base for superb accuracy
Vibration Isolation Self leveling pneumatic isolation system (either passive or electronically controlled active leveling, option)
Control System Beckhoff CNC industrial standard high performance machine controller, Intel® CoreTM i7, Quad-Core
Programming resolution 1 nm linear, (0.01 nanometer optional) , 0.0000001 ° rotary
Set Points per second 3.000 (CNC), 10.000 (Direct Drive)
File Transfer USB, Ethernet
Water Control Active chiller, < 0.02 °C/ 2 h
Evacuation Machining chamber air evacuation filter < 1 μm
Turning Performance Form accuracy < 0.1 μm, surface roughness (Ra) < 1.5 nanometers
Work Piece Diameter 150 mm

 

Linear Axis
Travel X: 200 mm; Z: 150mm
Accuracy over Full Travel/Feedback Type +/- 1 μm, resolution 0,03125 nm
Straightness +/-0.2 μm
Pitch, Roll, Yaw +/- 2 arcsec for all
Max. Speed 15 m/min
Drive System Brushless linear motor
Load Capacity / Stiffness 280 N/μm horizontal, 170 N/μm side
Media Supply Compact integrated hydrostatic supply unit ISO VG 22
Interface 2x NanoGrip Ultra precise clamping system 0.5 μm repeatability

 

Workholding Spindle
Type Groove compensated air bearing
Load Capacity 30 kg @ 6.9 bar
Axial/Radial Stiffness 228 N/μm / 98 N/μm @ 6.9 bar
Motion Accuracy Axial < 20 nm, radial < 20 nm
Max. Speed Position control : 4.000 rpm, speed control: 18.000 rpm, bidirectional
Feedback Resolution 0.07 arcsec.
Thermal Control Integrated water cooling with chiller
Interface NanoGrip Ultra precise clamping system 0.5 μm repeatability

 

Optional
Air Conditioning Air flow circulation, overpressure for axis contamination protection, △T <0.3°C
ILSONIC Diamond machining of steel / glass (comapre ILSonic)
Tactile measurment Touch probe (compare In Line Metrology)
Optical surface scanning Chromatic confocal sensor

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IL300 | UP Lathe

flexible. productive. allrounder.

The IL300 is the leading ultra-precision diamond lathe for highly productive, highly flexible optics manufacturing. It was developed to increase productivity in ultra-precision technology. Consistently integrated zero-point clamping systems with submicron accuracy, a stainless-steel housing and a highly dynamic lightweight construction for maximum dynamics. The applications range from standard diamond turning to free-form manufacturing and microstructure generation to diamond turning of steel and infrared materials with ultrasound support (ILSONIC).

Also look at IlCentric300.

Innolite - Ultra Precision Machine Tools - IL300

Key Features

NanoGrip

Our NanoGrip zero-point clamping system interface allows for submicron repeatability in exchanging tools, sensors for in line metrology and work pieces with only a few seconds. It’s a fundamental feature for the leading-edge productivity of Innolite´s ultra-precision machines.
Individual pallets with four index positions for rotating at 90° angular steps are the exchangeable interface for the chucks mounted and aligned at the spindle (for work piece exchange) and at the Z-slide (for tool and sensor exchange).
Due to it´s robust design, turning operation of up to 5.000 rpm is supported on the spindle side. With a vacuum chuck adapter provided by Innolite, standard diamond turning functionality meets high productivity in next generation optical manufacturing.

Technical Specification

IL300 General
System Configuration Ultra Precision 3 (4) axis CNC high dynamic diamond turning lathe
Processes Turning, slow tool turning, measuring
Machine Base Natural granite base for superb accuracy
Vibration Isolation Self leveling pneumatic isolation system (either passive or electronically controlled active leveling, option)
Control System Beckhoff CNC industrial standard high performance machine controller, Intel® CoreTM i7, Quad-Core
Programming resolution 1 nm linear, (0.01 nanometer optional) , 0.0000001 ° rotary
Set Points per second 3.000 (CNC), 10.000 (Direct Drive)
File Transfer USB, Ethernet
Water Control Active chiller, < 0.02 °C/ 2 h
Evacuation Machining chamber air evacuation filter < 1 μm
Turning Performance Form accuracy < 0.2 μm, surface roughness (Ra) < 3 nanometers
Work Piece Diameter 300 mm

 

Linear Axis
Travel X, Z: 300mm
Accuracy over Full Travel/Feedback Type +/- 1 μm, resolution 0,03125 nm
Straightness +/-0.2 μm
Pitch, Roll, Yaw +/- 2 arcsec for all
Max. Speed 15 m/min
Drive System Brushless linear motor
Load Capacity / Stiffness 420 N/μm horizontal, 210 N/μm side
Media Supply Compact integrated hydrostatic supply unit ISO VG 22
Interface 2x NanoGrip Ultra precise clamping system 0.5 μm repeatability

 

Workholding Spindle
Type Groove compensated air bearing
Load Capacity 70 kg @ 6.9 bar
Axial/Radial Stiffness 228 N/μm / 98 N/μm @ 6.9 bar
Motion Accuracy Axial < 20 nm, radial < 20 nm
Max. Speed 5.000 rpm, bidirectional
Feedback Resolution 0.07 arcsec.
Thermal Control Integrated water cooling with chiller
Interface NanoGrip Ultra precise clamping system 0.5 μm repeatability

 

B-Axis (Optional)
Type Oil hydrostatic rotary axis
Drive Torque direct drive 21.9 Nm
Accuracy < 60 nm radial runout
Stiffness > 4.000 N/mm2
Interface NanoGrip Ultra precise clamping system 0.5 μm repeatability

 

Optional
Air Conditioning Air flow circulation, overpressure for axis contamination protection, △T <0.3°C
ILSONIC Diamond machining of steel / glass (comapre ILSonic)
Tactile measurment Touch probe (compare In Line Metrology)
Optical surface scanning Chromatic confocal sensor

Videos

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Innolite - Ultra Precision Machine Tools - IL500

IL500 | UP Lathe

large scale. process combination. automation.

In addition to large components with diameters of up to 500 mm, the IL500 offers unique options for simultaneous process equipment or parallelization of processes. With three or four ultra-precision axes, spherical, free-form and also micro-structured optics can be efficiently manufactured. Integrated measurement technology enables the inline characterization of surfaces with direct compensation. In this way, preprocessing steps and ultra-precise finishing can be efficiently combined with the highest levels of accuracy. Prepared for loading with robots, the machine is the ideal platform for automated series production.

IL600 | UP Machining Center

five axes. process variety. optics characterization.

The IL600 is a four- or optionally five-axis ultra-precision machining center for highly productive optics production. The integrated NanoGrip zero-point clamping systems are world leaders in flexibility in diamond machining systems. The IL600 enables the combination of diamond turning and free-form turning, planing and milling as well as the grinding of optical surfaces. In addition to the machining processes, we offer a range of contact and non-contact sensors that can be fully integrated into the machine and the control system for advanced component characterization.

 

 

 

Innolite - Ultra Precision Machine Tools - IL600

Key Features

Overdrive

The Innolite Overdrive is an ultra-high dynamic free-form and micro structure generator for diamond turning. It uniquely combines the advantages of slow slide and fast tool turning for advanced diamond untrue machining. Its linear motor driven hydrostatic slide with a moving mass of only 3 kg compares to the damping and the stiffness of a standard ultra-precision axis ensuring superb surface finish compared to an aerostatic fast tool servo. However, the dynamic reaction force during high dynamic motion is significantly lower and corresponding achievable dynamics are much higher compared to conventional slow tool turning. In terms of control system integration, the Overdrive can be programmed as a standard CNC axis as well as with the Innolite DirectDrive 2D or Direct Drive 3D.

NanoGrip

Our NanoGrip zero-point clamping system interface allows for submicron repeatability in exchanging tools, sensors for in line metrology and work pieces with only a few seconds. It’s a fundamental feature for the leading-edge productivity of Innolite´s ultra-precision machines.
Individual pallets with four index positions for rotating at 90° angular steps are the exchangeable interface for the chucks mounted and aligned at the spindle (for work piece exchange) and at the Z-slide (for tool and sensor exchange).
Due to it´s robust design, turning operation of up to 5.000 rpm is supported on the spindle side. With a vacuum chuck adapter provided by Innolite, standard diamond turning functionality meets high productivity in next generation optical manufacturing.

Technical Specification

IL600 General
System Configuration Ultra Precision 4 (5) axis CNC high dynamic ultra precision machining center
Processes Turning, slow tool turning, fast tool turning, ruling, milling grinding, measuring
Machine Base Natural granite base for superb accuracy
Vibration Isolation Self leveling pneumatic isolation system (either passive or electronically controlled active leveling, option)
Control System Beckhoff CNC industrial standard high performance machine controller, Intel® CoreTM i7, Quad-Core
Programming resolution 1 nm linear, (0.01 nanometer optional) , 0.0000001 ° rotary
Set Points per second 3.000 (CNC), 10.000 (Direct Drive)
File Transfer USB, Ethernet
Water Control Active chiller, < 0.02 °C/ 2 h
Evacuation Machining chamber air evacuation filter < 1 μm
Turning Performance Form accuracy < 0.2 μm, surface roughness (Ra) < 3 nanometers
Work Piece Diameter 600 mm

 

Linear Axis
Travel X: 600mm, Z: 400mm, Y:250mm
Accuracy over Full Travel/Feedback Type `+/- 1 μm, resolution 0,03125 nm for all axes
Straightness `+/-0.1μm/ 100mm
Pitch, Roll, Yaw +/- 2 arcsec for all
Max. Speed X: 15 m/min
Drive System Brushless linear motor
Load Capacity / Stiffness 540 N/μm horizontal, 210 N/μm side
Media Supply Compact integrated hydrostatic supply unit ISO VG 22
Interface 2x NanoGrip Ultra precise clamping system 0.5 μm repeatability

 

Workholding Spindle
Type Groove compensated air bearing
Load Capacity 70 kg @ 6.9 bar
Axial/Radial Stiffness 228 N/μm / 98 N/μm @ 6.9 bar
Motion Accuracy Axial < 20 nm, radial < 20 nm
Max. Speed 5.000 rpm, bidirectional
Feedback Resolution 0.07 arcsec.
Thermal Control Integrated water cooling with chiller
Interface NanoGrip Ultra precise clamping system 0.5 μm repeatability

 

B-Axis (Optional)
Type Oil hydrostatic rotary axis
Drive Torque direct drive 21.9 Nm
Accuracy < 60 nm radial runout
Stiffness > 4.000 N/mm2 axial
Interface NanoGrip Ultra precise clamping system 0.5 μm repeatability

 

Overdrive (Optional)
Type Oil hydrostatic high dynamic linear axis (superior damping compared to aerostatic voice coil Fast Tool System)
Travel 50 mm
Programming Options CNC, Direct Drive 2D, Direct Drive 3D
Resolution of scale 0,03125 nm
Max. Speed 2m/sec

 

Optional
Air Conditioning Air flow circulation, overpressure for axis contamination prevention, △T <0.3°C
ILSONIC Diamond machining of steel / glass
Tactile measurment Touch probe
Optical surface scanning Chromatic confocal sensor

Videos

PDF

Innolite - Ultra Precision Machine Tools - ILCam

Software for Generating Optics Manufcaturing Jobs | ILCAM

ILCAM is the programming platform for all Innolite diamond and center turning machines. It is designed to create high quality production jobs for advanced optics manufacturing, consisting of pre-machining data analysis, referencing routines, machining programs, measurement cycles for quality assurance and integrated quality documentation. It allows for conventional optics manufacturing, free-form and micro structure generation as well as for combined optical surfaces. Different from conventional CAD/CAM software the fully automated integration of optics characterization routines is of highest value during production. With its functional spectrum, ILCAM is a unique platform for ultra-precision machining.

 

 

Videos

Advanced Optics Characterization | In Line Metrology

Innolite is consequently developing in line metrology solutions consisting of ultra-precision contact and non-contact sensors, their productive machine integration as well as corresponding software routines for user friendly application. The standardized use of such metrology is a key for “driving productivity in ultra-precision technology” to Innolite. We measure dimensions, surfaces and optical axes on our machines to reach highest quality standards

 

 

 

 

Innolite - Ultra Precision Machine Tools - Line Metrology

Technical Specification

Tactile Sensor
Measuring Task Dimensions
Measuring Directions 3 (x, y, z), tactile
Sensitivity 0,25 μm
Contact Force 0,07 N

 

Chromatic Confocal Probe
Measuring Task Surface shape, surface orientation
Measuring directions 1 (z), non-contact
Distance Sensor / Focus 10 mm
Measuring Range 1000 μm
Resolution 26 nm
Acceptance angle `+/- 15° @ error < 0.5 μm
Rotary Alignment of Probe 0°-90°

 

LVDT Scanning Probe
Measuring Task Surface shape, surface orientation
Measuring Directions 1 (z), tactile
Sensitivity 25 nm
Contact Scanning Force 1 mN

 

Autocollimator
Measuring Task Optical axis of sphere
Focal distance 200 mm, 300 mm
Objectives 6 automated exchange
Resolution < 1 ” of optical axis
Wavelength 532nm, 634nm

Videos