Together with ELEMENT 3-5 GmbH and the Fraunhofer Institute for
Laser Technology ILT, Innolite GmbH is working on the ‘EPIWIN’
project. The aim of the project is to combine laser structuring
processes in the sub-µm and ~10µm range with a new and innovative
method of epitaxy to enable the production of low-dislocation layers
in finished individual dies.
The aim is to significantly reduce costs by using only one machine
and the possibility of assembly line production. In addition, the
reduction of the necessary process steps and the technology of
low-temperature epitaxy will halve energy consumption and reduce the
environmental impact, as no wafer transport in vacuum-sealed
disposable packaging is required.
The bundling of different expertise within NRW provides the
necessary basis for this joint project and very good prospects for
the utilisation of the results.