Sensor Module

Innolite - Module Sensor Module

Sensor Module | Double

The sensor module allows for two sensors to be used in a fully automated way simultaneously. Two linear air bearing axes position the sensors into the measurement range or retract into the garage. A classical sensor combination especially for alignment turning is the chromatic confocal together with the 3DOF tactile sensor. Alternative sensors can be installed and aligned. A control system integrated hood protects the sensors and axes during machining and opens up for measurement only. The mechanical and electrical integration of the unit is identical to the Sensor Module | Single.

Sensor Module | Single

The module allows for a fully automated sensor integration into IL series ultra-precision machine tools. An ultra-precise linear air bearing axis drives the sensor into the measurement range or into the protective position inside the garage. A control system integrated hood protects the sensor during machining and opens up for measurement only. The module holds for the chromatic confocal, the tactile or the LVDT probe alternatively. With a NanoGrip interface, the unit can be installed inside the machine within minutes at highest geometrical repeatability. Electrical and signal connectivity is integrated into the machine slide for best protection and compact set-up.

Innolite - Module Sensor Module

Sensor Module | Basic

The module holds and vertically positions a single sensor without automation. A protective cover can be positioned to secure the sensor during machining but still to leave it perfectly aligned inside the machining room. As standard configuration, the module comes with the chromatic confocal sensor for non-contact surface scanning. Alternatively, a 3DOF tactile sensor or an inductive LVDT can be mounted to the platform. A microscope camera for edge detection or dimensional metrology can be mounted. With a NanoGrip interface, the unit can be installed inside the machine within minutes at highest geometrical repeatability.

General
Description
Sensor Module Basic
Manual cover, no linear axis
Sensor Module Single
One air bearing linear axis for sensor positioning & adjustment
Sensor Module Double
Two air bearing linear axes for sensor positioning & adjustment
1DOF non-contact
Chromatic confocal, 6 mm distance, 300 µm range, 16 nm resolution
1DOF contact
LVDT, +/- 0.5 mm range, 25 nm resolution
3DOF contact
Tactile probe, 0.25 µm accuracy, <0.02 N force
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