ILÅngström

For IL200 and IL300 series machines the ILÅngström package will guarantee ultimate accuracy with following errors below +/- 0.5 nm as used for cutting mold inserts for camera lenses or other sub-nanometer surface finish requirements. The package focuses on ultra-low vibration excitation as caused by internal sources and external influences.

Active Vibration Damping

The IL series machines utilize passive vibration decoupling elements to protect the machine bed with mechanical valves for position control as a standard. As an update with improved control precision, the active vibration package introduces electro-magnetic valves and linear displacement sensors for a high precision electronic PID control. Lowest machine bed excitation individually tuned to the machines surroundings as well as best possible counteraction due to internal dynamic excitation can be realized with the system.

Separated Power Cabinet

The initial Innolite philosophy is to design integrated machine tools with all basic and peripheral functionality on board. If surface finishes in the low sub-nanometer range are required and the surrounding foundation is not rigid enough, the power cabinet with all integrated peripheries can be separated to be placed on different ground foundation. To investigate and judge on the individual set-up situation, we offer certified measurements of ground vibration to suggest and support the customer.