LVDT Probe

The LVDT is a tactile sensor to do single line scans over an optical surface. Due to an air bearing slide and a super low air pressure pre-load force, the diamond tip will apply lowest stress to the surface to be measured. The capacitive measurement unit will allow a resolution of down to 10th of nanometers. The sensor is integrated in ILCAM to program the measurement job, to interpret the data and to potentially compensate for any shape deviation.