Y-Axis | Modular

Innolite - Module Y-Axis | Modular

This linear axis with a total stroke of 20 mm is an add-on module for IL200, IL300 and IL500 series machines to automatically set tool height for up to 3 tools. A linear direct drive in combination with a high resolution optical encoder allows for lowest vertical positioning steps < 100 nm. Positions for the different tools can be stored to the controls tool table and be executed automatically on demand. With NanoGrip interfacing the autonomous axis can be integrated within a few minutes only.

General
Description
Type
Small stroke vertical axis for tool positioning
Stroke
20 mm
Tools
Up to 3 tools in parallel
Accuracy
Vertical steps < 100 nm
Automation
Automatic tool height storage in tool table
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