IL600
UP Machining Center

five axes. process variety. optics characterization.

The IL600 is a four- or optionally five-axis ultra-precision machining center for highly productive optics production. The integrated NanoGrip zero-point clamping systems are world leaders in flexibility in diamond machining systems. The IL600 enables the combination of diamond turning and free-form turning, planing and milling as well as the grinding of optical surfaces. In addition to the machining processes, we offer a range of contact and non-contact sensors that can be fully integrated into the machine and the control system for advanced component characterization.

Key Features

Overdrive

The Innolite Overdrive is an ultra-high dynamic free-form and micro structure generator for diamond turning. It uniquely combines the advantages of slow slide and fast tool turning for advanced diamond untrue machining. Its linear motor driven hydrostatic slide with a moving mass of only 3 kg compares to the damping and the stiffness of a standard ultra-precision axis ensuring superb surface finish compared to an aerostatic fast tool servo. However, the dynamic reaction force during high dynamic motion is significantly lower and corresponding achievable dynamics are much higher compared to conventional slow tool turning. In terms of control system integration, the Overdrive can be programmed as a standard CNC axis as well as with the Innolite DirectDrive 2D or Direct Drive 3D.

NanoGrip

Our NanoGrip zero-point clamping system interface allows for submicron repeatability in exchanging tools, sensors for in line metrology and work pieces with only a few seconds. It’s a fundamental feature for the leading-edge productivity of Innolite´s ultra-precision machines.
Individual pallets with four index positions for rotating at 90° angular steps are the exchangeable interface for the chucks mounted and aligned at the spindle (for work piece exchange) and at the Z-slide (for tool and sensor exchange).
Due to it´s robust design, turning operation of up to 5,000 rpm is supported on the spindle side. With a vacuum chuck adapter provided by Innolite, standard diamond turning functionality meets high productivity in next generation optical manufacturing.

Dive into the details:

IL600 General
System Configuration
Ultra Precision 4 (5) axis CNC high dynamic ultra precision machining center
Processes
Turning, slow tool turning, fast tool turning, ruling, milling grinding, measuring
Machine Base
Natural granite base for superb accuracy
Vibration Isolation
Self leveling pneumatic isolation system (either passive or electronically controlled active leveling, option)
Control System
Beckhoff CNC industrial standard high performance machine controller, Intel® CoreTM i7, Quad-Core
Programming resolution
1 nm linear, (0.01 nanometer optional) , 0.0000001° rotary
Set Points per second
3,000 (CNC), 10,000 (Direct Drive)
File Transfer
USB, Ethernet
Water Control
Active chiller, < 0.02 °C/ 2 h
Evacuation
Machining chamber air evacuation filter < 1 μm
Turning Performance
Form accuracy < 0.1 μm, surface roughness (Ra) < 1.5 nanometers
Work Piece Diameter
600 mm
Linear Axis
Travel
X: 600 mm, Z: 400 mm, Y:250 mm
Accuracy over Full Travel/Feedback Type
+/- 1 μm, resolution 0.03125 nm for all axes
Straightness
+/- 0.1μm / 100 mm
Pitch, Roll, Yaw
+/- 2 arcsec for all
Max. Speed
X: 15 m/min
Drive System
Brushless linear motor
Load Capacity / Stiffness
540 N/μm horizontal, 210 N/μm side
Media Supply
Compact integrated hydrostatic supply unit ISO VG 10
Interface
6x NanoGrip Ultra precise clamping system 0.5 μm repeatability
Workholding Spindle
Type
Groove compensated air bearing
Load Capacity
70 kg @ 6.9 bar
Axial/Radial Stiffness
228 N/μm / 98 N/μm @ 6.9 bar
Motion Accuracy
Axial < 15 nm, radial < 15 nm
Max. Speed
5,000 rpm, bidirectional
Feedback Resolution
0.07 arcsec
Thermal Control
Integrated water cooling with chiller
Interface
NanoGrip Ultra precise clamping system 0.5 μm repeatability
Brochure Download

Videos

IL600 NanoGrip Prinzip NanoGrip Produktpalette
MODULES

Innolite platforms are designed to be modular

The work spectrum of the IL600 can be expanded with a large number of different modules. The following is a list of all modules, arranged according to their area of application