IL1200

IL1200 is an ultra precision 4-axis CNC large vertical machining center (large diameter diamond lathe), which consists of machine base (natural granite integral body structure), self leveling pneumatic vibration isolation system, Beckhoff CNC industrial standard high-performance controller PC, digital servo drive system, a cutting fluid spray cooling system, water circulation cooling system for all linear axis and spindle, air temperature control and filtering system, non-contact online measurement, programming software, Nanogrip Zero-point clamping, optical tool setting, spindle balance module, etc; It is a large turning platform to machine large scale optical mirrors of diameters up to 1.2 m and the max height of part up to 350 mm. The machining accuracy is less than 23 nm RMS within 300 mm diameter area.
It can process components such as large aperture flat surfaces, spherical surfaces, aspherical surfaces and other rotationally symmetric surface,non-symmetric freeform surfaces such as off axis paraboloids, polynomial freeform surface and so on. It can also process infrared sub wavelength micro nanostructures on large aperture aspherical substrates.
The material which could be cut includes Aluminum, brass, Nip and other non-ferrous metal. Germanium, silicon and other crystal materals, PMMA and other Polymer materials.
The hydrostatic supported gantry structure can achieve higher accuracy in diamond turning. The vertical arrangement of the main spindle can optimize the installation and precise alignment of the mirror structure under stress, without being affected by gravity. The NanoGrip interface on the Z-axis sliding end ensures that different tool handles, other fixtures, or measuring sensors are adapted to the complex machining sequence that follows. High precision diamond turning can be achieved through ILCAM software, including programming functions for rotational symmetric surfaces such as plano, spherical, aspheric surfaces and other rotationally symmetric surface, off axis parabolic surfaces, and non-symmetrical free form surfaces, as well as 2D and 3D compensation machining and microstructure surface machining processes.

Key Features

NanoGrip

Our NanoGrip zero-point clamping system interface allows for submicron repeatability in exchanging tools, sensors for in line metrologoy and work pieces with only a few seconds. It’s a fundamental feature for the leading-edge productivitys of Innolite’s ultra-precision machines.
Individual pallets with four index positions for rotating at 90° angular steps are the exchangeable interface for the chucks mounted and aligned at the spindle (for work piece exchange) and at the Z-slide (for tool and sensor exchange).
Due to it’s robust design, turning operation of up to 5000 rpm is supported on the spindle side. With a vacuum chuck adapter provided by Innolite, standard diamong turning funcionality meets high productivity in next generation optical manufacturing. The repeatability of the system is less than 0.5 um.

Dive into the details:

IL1200 General
System Configuration
Ultra precision 4 axes (XYZC) CNC large scale vertical machining center
Machine Base
Natural granite base for excellent accuracy
Vibration Isolation
Self leveling pneumatic isolation system
Control System
Beckhoff TwinCAT 3 CNC high performance machine controller PC; Intel® Core™ i5 CPU, 4 Cores; operating system Windows 10; 21.5″ color flat panel touch screen display and 22″color flat panel display; EtherCAT bus communication technology; Digital Servo drives with 100 kHz current & position control loop frequency
Programming resolution
0.1 nm linear, 0.00000001° angle
Set Points (pts/sec)
Up to 2000 in CNC mode; 10000 in DirectDrive3D
File Transfer
USB, Ethernet
Requirements
Air: 7-10 bars, 300 l/min, 10 μm prefiltered; Electrical: 400 V, 32 A, 50/60 Hz; Water: 8-10°C, 30 L/min; Connectivity: Ethernet
Machine Size
3600 * 3500 * 2800 mm (D * W * H)
Power Cabinet
2500 * 1200 * 2100 mm (D * W * H)
Standalone Panel Size
610 * 610 mm (D * W)
NanoGrip Interfacing
Ultra-precise clamping system for workpiece & tool Clamping mechanism: Spring loaded mechanical clamping, pneumatic unclamping repeatability Accuracy: < 0.5 μm radial & axial; excellent stiffness and accuracy; up to 5000 rpm for spindle use
Linear Axis
Travel
X: 950 mm; Y: 850 mm; Z: 340 mm
Feedback Type
Noncontact Linear Encoder
Axis positioning accuracy resolution
0.03125 nm (Laser Holographic Grating Encoder)
Noncontact linear encoder resolution
0.03125 nm
Straightness
< +/- 0.2 μm
Pitch, Roll, Yaw
< +/- 2 arcsec for all
Max. Speed
2000 mm/min
Drive System
Brushless linear motor
Bearing Type
Hydrostatic (Iron coreless, High stiffness)
Static Stiffness
X & Y: 420 N/ μm vertical; Z: 205 N/μm horizontal (at guideway)
Thermal Control
Integrated cooling with 4 Individual Channels
Workholding Spindle
Type
Workholding Spindle; groove compensated air bearing
Load Capacity Radial
1.8kN @ 7 bar
Load Capacity Axial
3.0 kN @ 7 bar
Axial Stiffness
1150 N/μm
Radial Stiffness
230 N/μm
Motion Accuracy Axial
≤ 15 nm
Motion Accuracy Radial
≤ 15 nm
Max. Spindle Speed
1500 rpm
Position Control
< 300 rpm
Feedback Resolution
0.008 arcsec
Thermal Control
Integrated cooling
Interface
NanoGrip (optional)
Accessories
Water Circulation Cooling System
Water circulation cooling system for all linear axis and spindle
Internal Chiller and Water Tank
Outlet temperature control ≤ 0.01° C.
Optical tool setter
software integrated to HMI
Liquid coolant system
2 or 3 nozzles, the volume, switches could be controlled by both control pannel and HMI
Spindle balancing
software integrated to HMI- based on X/C axis following error
Vacuum chuck, Fixture, Diamond tools. Single head tool holder (NanoGrip Interfacing). Tool setting parts. External chiller
Tesa-u gage
The resolution is 0.05 um
Process observation camera with extra TFT screen for long time machining observation
Integrated Climate control and filtration system
Thermal stability ≤ 0.01°C.
Filter grade:G4, E11, E12, H13, etc.
Acoustic Emission Sensor
software integrated to HMI
Software Update Services
YES


Non contact in line metrology resolution < 10 nm equipped with sphere, asphere, freeform surface analysis software


Videos

IL1200 Machine Showcase